Home Site map Contact
Other industries
 Home   Company   Services   Products   References   News   Careers 

A²ECF - Agileo Automation Controller Framework for standalone and cluster semiconductor equipment

Accueil > Products > Semiconductor > A²ECF

A²ECF is an equipment automation framework for process or metrology equipment control with or without EFEM management.

Higly customizable, this SEMI E95 compliant framework proposes a standardized way to present user interface for semiconductor applications:
  • Multiuser management with access rights (operator, process engineer, field service engineer for example)
  • Automatic trace generation with tools to analyze equipment activity
  • Operator actions recording
  • EFEM devices management such as (contact us for list of supported devices):
    • Wafer handlers with one or dual arms
    • Pre-aligners
    • Load Ports and FOUP Openers
    • Scribe readers
  • Schedulers for wafer flow sequencing
  • Data collection to the Fab Host and Remote control through SECS/GEM and PV2 interface library

Download datasheet

Follow us on Linkedin | Facebook | Agileo Automation - 2020 | Legal statements | Recommend this site | Design by ADN